Metal/insulator/semiconductor contacts for ultimately scaled CMOS nodes: projected benefits and remaining challenges | Borrel, Julien
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Metal/insulator/semiconductor contacts for ultimately scaled CMOS nodes: projected benefits and remaining challenges

Archive ouverte : Communication dans un congrès

Borrel, Julien | Hutin, Louis | Grampeix, Helen | Nolot, Emmanuel | Tessaire, Magali | Rodriguez, Guillaume | Morand, Yves | Nemouchi, Fabrice | Gregoire, Magali | Dubois, Emmanuel | Vinet, Maud

Edité par HAL CCSD ; IEEE

International audience. In this paper, some key fundamental aspects of Metal / Insulator / Semiconductor contacts as well as practical issues occurring with their implementation are reviewed in order to fully comprehend the opportunities and limitations of this approach.

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