Polydimethylsiloxane micro-channels application for the study of dynamic wetting of nano-etched silicon surfaces based on acoustic characterization method | Salhab, Abbas
/5

0 avis

Polydimethylsiloxane micro-channels application for the study of dynamic wetting of nano-etched silicon surfaces based on acoustic characterization method

Archive ouverte : Communication dans un congrès

Salhab, Abbas | Carlier, Julien | Campistron, Pierre | Neyens, M. | Toubal, Malika | Nongaillard, Bertrand | Thomy, V.

Edité par HAL CCSD ; Trans Tech Publications Ltd

ORAL. International audience. Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of Deep Trench Isolation (DTI) structures using ultra-high frequency acoustic method. The dynamics of the fluid will be established using a PolyDiMethylSiloxane (PDMS) micro-channel placed on top of the structures, in order to obtain conditions as close as possible to those used in the industrial process. Wetting state of the DTI structures is determined based on the measured acoustic reflection coefficient.

Consulter en ligne

Suggestions

Du même auteur

Nanostructures wetting evaluation using ultra high frequency ultrasound | Salhab, Abbas

Nanostructures wetting evaluation using ultra high frequency ultrasound

Archive ouverte: Communication dans un congrès

Salhab, Abbas | 2022-01-22

oral. International audience. Ultrasounds are a great tool for defects detection particularly for optically non-transparent materials. Hence, working at very high frequency (#GHz) allows the detection of nanoscale c...

Analysis of Wetting Transition and Pattern Collapse During the Drying Process of Deep Trench Isolation Structures Using Ultra-high Frequency Acoustic Waves and SEM Imaging | Salhab, Abbas

Analysis of Wetting Transition and Pattern Collapse During the Drying Proce...

Archive ouverte: Communication dans un congrès

Salhab, Abbas | 2022-04-11

International audience. Removing contaminants from silicon wafers surface is an important part in the semiconductors industry. Thus through wet cleaning processes, after each operation (lithography, etching, etc…), ...

Experimental studies on evaporation kinetics of gold nanofluid droplets: Influence of nanoparticle sizes and coating on thermal performance | Zaaroura, Ibrahim

Experimental studies on evaporation kinetics of gold nanofluid droplets: In...

Archive ouverte: Article de revue

Zaaroura, Ibrahim | 2021-01-25

International audience. In this work, a series of experiments investigate the evaporation of gold nanofluid sessile droplets on a perfluorodecyltrichlorosilane (PFTS) silicon substrate heated to 77 °C. The evaporati...

Du même sujet

Dynamic characterization of the wetting and drying states of DTI (Deep Trench Isolation) structures using high frequency ultrasonic waves. Caractérisation dynamique de l'état de mouillage et de séchage de structures DTI(Deep Trench Isolation) par ondes ultrasonores haute fréquence | Salhab, Abbas

Dynamic characterization of the wetting and drying states of DTI (Deep Tren...

Archive ouverte: Thèse

Salhab, Abbas | 2022-02-04

In the semiconductor industry, effective wet cleaning of contamination is a critical factor in ensuring good quality of electronic products. The cycle between the wetting and drying processes can create several problems in the hig...

Nanostructures wetting evaluation using ultra high frequency ultrasound | Salhab, Abbas

Nanostructures wetting evaluation using ultra high frequency ultrasound

Archive ouverte: Communication dans un congrès

Salhab, Abbas | 2022-01-22

oral. International audience. Ultrasounds are a great tool for defects detection particularly for optically non-transparent materials. Hence, working at very high frequency (#GHz) allows the detection of nanoscale c...

RF and Six-Port Microwave Sensing Techniques for Nondestructive Testing and Evaluation | Haddadi, Kamel

RF and Six-Port Microwave Sensing Techniques for Nondestructive Testing and...

Archive ouverte: Communication dans un congrès

Haddadi, Kamel | 2021-08-09

International audience. The physical and mechanical properties of urban structures can be inspected and monitored using nondestructive testing and evaluation (NDT&E) techniques. In particular, microwave methods have...

Acoustic radiation force on small spheres due to transient acoustic fields | Wang, Qing

Acoustic radiation force on small spheres due to transient acoustic fields

Archive ouverte: Article de revue

Wang, Qing | 2021-04

International audience. Acoustic radiation force is a net force experienced by an object under the action of an acoustic wave. Most theoretical models require the acoustic wave to be periodic, if not purely monofreq...

Roll-to-roll in-line implementation of microwave free-space non-destructive evaluation of conductive composite thin layer materials | Koutsoukis, Grigorios

Roll-to-roll in-line implementation of microwave free-space non-destructive...

Archive ouverte: Article de revue

Koutsoukis, Grigorios | 2021-01

International audience. A free-space microwave nondestructive testing and evaluation module is developed for the low-power, non-ionizing, contactless, and real-time characterization of doped composite thin-film mate...

Single Beam Acoustical Tweezers Based on Focused Beams: A Numerical Analysis of Two-Dimensional and Three-Dimensional Trapping Capabilities | Gong, Zhixiong

Single Beam Acoustical Tweezers Based on Focused Beams: A Numerical Analysi...

Archive ouverte: Article de revue

Gong, Zhixiong | 2022-10

International audience. Selective single beam tweezers open tremendous perspectives in microfluidics and microbiology for the micromanipulation, assembly, and mechanical properties testing of microparticles, cells, ...

Chargement des enrichissements...