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High temperature gradient Pirani micro-sensor designed and tested for aerodynamic wall pressure measurement
Archive ouverte : Article de revue
Edité par HAL CCSD ; Institute of Electrical and Electronics Engineers
An earlier version of this paper was presented at the IEEE Sensors 2020 conference and was published in its Proceedings with the title “Aerodynamic wall pressure measurement using a high temperature gradient Pirani micro-sensor” (DOI: 10.1109/SENSORS47125.2020.9278842). International audience. This paper presents and discusses the first demonstration of aerodynamic wall pressure measurement using a thermal Pirani effect based micro-sensor. The thermal micro-sensor is designed as a suspended micro-hot-wire separated from the substrate by a nanoscale gap, and mechanically supported by perpendicular micro-bridges. The micro-sensor was calibrated for pressure measurement from 10 kPa to 800 kPa. It was then used as aerodynamic wall pressure sensor in a turbulent boundary layer wind tunnel and successfully measured the 1.1 kPa depression occurring in the wind tunnel when the flow velocity goes up to 40 m/s.
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