Theoretical calculation of the acoustic force on a patterned silicon wafer during megasonic cleaning | Vasseur, Jerome O.
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Theoretical calculation of the acoustic force on a patterned silicon wafer during megasonic cleaning

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Vasseur, Jerome O. | Deymier, P. | Khelif, A. | Djafari-Rouhani, Bahram | Vasseur, J. | Raghavan, S.

Edité par HAL CCSD ; American Institute of Physics

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