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H2S photoacoustic detection with an integrated THz gas sensor for food quality control. H2S photoacoustic detection with an integrated THz gas sensor for food quality control: [Invited]
Archive ouverte : Communication dans un congrès
oral session Spectroscopy/Gas phase spectroscopy 6. International audience. THz photoacoustic (PA) detection of H 2 S gas concentrations on the order of 200 ppm using a Poly-Si membrane as a PA microphone is reported. This result is a first step towards the demonstration of a fully integrated THz PA gas sensor with an expected sensitivity of 10’s of ppb.
- Sujets
- chemical variables measurement
- elemental semiconductors
- food technology
- gas sensors
- hydrogen compounds
- membranes
- microphones
- photodetectors
- silicon
- submillimetre wave detectors
- submillimetre wave measurement
- terahertz wave detectors
- [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
- [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
- [SPI.TRON]Engineering Sciences [physics]/Electronics