Development of broadband high-frequency piezoelectric micromachined ultrasonic transducer array

0 avis

Development of broadband high-frequency piezoelectric micromachined ultrasonic transducer array

Archive ouverte : Article de revue

International audience. Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However, PMUT arrays have so far failed to combine the wide, high-frequency bandwidth needed to achieve a high axial resolution. In this paper, a polydimethylsiloxane (PDMS) backing structure is introduced into the PMUTs to improve the device bandwidth while keeping a sub-wavelength (λ) pitch. We implement this backing on a 16 × 8 array with 75 µm pitch (3λ/4) with a 15 MHz working frequency. Adding the backing nearly doubles the bandwidth to 92% (−6 dB) and has little influence on the impulse response sensitivity. By widening the transducer bandwidth, this backing may enable using PMUT ultrasonic arrays for high-resolution 3D imaging.

Langue: Anglais

Date de publication: 2021

Source: ISSN: 1424-8220

Sujets

Consulter en ligne

Consulter le document

Suggestions

Du même auteur

Development of backing piezoelectric micromachined ultrasonic transducer (B...

Archive ouverte: Communication dans un congrès

Wang, Xu-Bo | 2021-09-11

International audience. To improve the problem of narrow bandwidth and large crosstalk in high-frequency PMUT array, a PMUT device with a damping backing structure (B-PMUT) is proposed and realized. The device is a ...

Sensitivity-Bandwidth Optimization of PMUT with Acoustical Matching Using F...

Archive ouverte: Article de revue

He, Le-Ming | 2022-03

International audience. A new model in finite element method to study round-trip performance of piezoelectric micromachined ultrasonic transducers (pMUTs) is established. Most studies on the performance of pMUT are ...

Selective Manipulation with Spiraling Transducer Acoustical Tweezers

Archive ouverte: Communication dans un congrès

Lin, Siying | 2022-10-25

International audience. Microfluidics is fast becoming a critical technology for medicine and biology for its many important applications, e.g. precision medicine, single-cell sequencing and the manipulation of micr...

Du même sujet

$Numerical study of the reflected elastic waves using Rayleigh diffraction integral | Maghlaoui, Nadir$

Numerical study of the reflected elastic waves using Rayleigh diffraction i...

Archive ouverte: Article de revue

Maghlaoui, Nadir | 2019-10-25

International audience. In this work, the transient ultrasonic waves radiated by a linear phased array transducer in a liquid then reflected at a liquid solid interface is studied. A model based on the Rayleigh inte...

Obstacle warning system to improve the autonomy of wheelchair users. Systèm...

Archive ouverte: Communication dans un congrès

Tagne, Gilles | 2022-06-08

International audience. The main interest of this paper lies in the implementation of an obstacle alert application aiming at improving the autonomy of people using a wheelchair. This application is designed on a he...

Development of backing piezoelectric micromachined ultrasonic transducer (B...

Archive ouverte: Communication dans un congrès

Wang, Xu-Bo | 2021-09-11

Suivi, détection et caractérisation d’un front de lixiviation par technique...

Archive ouverte: Article de revue

Ciccarone, Charles | 2021-03-10

National audience. L’objectif du travail présenté est la détection, la caractérisation et le suivi d’un front de lixiviation sur une structure en béton. Pour cela, les conditions de lixiviations in situ ont été repr...

Experimental Evidence of the Existence of Bound States in the Continuum and...

Archive ouverte: Article de revue

Amrani, Madiha | 2021-01

International audience. Bound states in continuum (BICs) are resonances with zero width (infinite lifetime) without any leakage into the surrounding media. Their fascinating properties and potential applications hav...

Pump-probe localization technique of varying solid contacts

Archive ouverte: Article de revue

Terzi, Marina | 2021-05

International audience. A baseline-free defect localization method in thin plates is proposed and tested. In this proof-of-concept work, a steel ball pressed against an aluminum plate is used to mimic a surface cont...

Chargement des enrichissements...